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  4. Size and top electrode-edge effects on fatigue in Pb(Zr,Ti)O-3 capacitors with Pt-electrodes
 
research article

Size and top electrode-edge effects on fatigue in Pb(Zr,Ti)O-3 capacitors with Pt-electrodes

Torii, K.
•
Colla, E. L.
•
Song, H. W.
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2001
Integrated Ferroelectrics

The occurrence of switching-induced suppression of the remanent polarization (fatigue) in Pb(Zr,Ti)O-3 (PZT) ferroelectric capacitors with comb shaped top electrodes was studied by means of scanning force microscopy assisted by a lock-in amplifier. Fatigue occurs earlier in capacitor with narrower comb-fingers, mainly in the central part of the fingers. In addition to this size effect, electrode-edge effects could be observed. Along the edges, in an area of about 250nm width, the preferential direction of the blocked polarization is opposite to that in the center of the comb fingers; in this area, fatigue occurs generally one to two cycle-decades later. Self-recovery effects were also localized to mainly occur near the edges of the electrodes. The mechanism of these results is discussed on the basis of fringe field and stress at top electrode edge.

  • Details
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Type
research article
DOI
10.1080/10584580108215692
Web of Science ID

WOS:000167524400022

Author(s)
Torii, K.
Colla, E. L.
Song, H. W.
Tagantsev, A. K.  
No, K.
Setter, N.  
Date Issued

2001

Published in
Integrated Ferroelectrics
Volume

32

Issue

1-4

Start page

907

End page

916

Subjects

fatigue

•

ferroelectric capacitor

•

perimeter

•

stres

•

switchable polarization fatigue

•

thin-film capacitors

•

ferroelectric capacitors

•

suppression

•

ozone

•

ferroelectric capacitors

Note

Torii, K Ecole Polytech Fed Lausanne, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Ceram Lab, CH-1015 Lausanne, Switzerland Korea Adv Inst Sci & Technol, Elect & Opt Lab, Taejon 305701, South Korea

411XF

Cited References Count:19

Editorial or Peer reviewed

REVIEWED

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August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233474
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