research article

Direct Visual Observation of Powder Dynamics in Rf Plasma-Assisted Deposition

Howling, A. A.  
•
Hollenstein, C.  
•
Paris, P. J.
1991
Applied Physics Letters

Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.

Type
research article
DOI
10.1063/1.105322
Author(s)
Howling, A. A.  
Hollenstein, C.  
Paris, P. J.
Date Issued

1991

Published in
Applied Physics Letters
Volume

59

Issue

12

Start page

1409

End page

1411

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Available on Infoscience
April 16, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/21165