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conference paper

Horizontal growth of dense carbon nanotube membranes for interconnects and sensors

Le Poche, Hélène
•
Fournier, Adeline
•
Dijon, Jean
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2013
Proceedings of the annual meeting of the GDR-I GNT 2012
Annual meeting of the GDR-I GNT: Graphene and Nanotubes Science and Applications

Dense array of horizontal carbon nanotubes (CNTs) connected to electrodes is a basic building block for devices in a wide field of applications such as interconnect lines or micro-electromechanical systems (MEMS) for sensing for instance. For interconnects, maximizing the CNT density means maximizing the number of parallel conduction paths, which is necessary to be competitive with copper. For gas sensing, a membrane made of high density CNTs should promote a high sensitivity by developing a high detection surface. Despite the recognized superior properties of CNTs, their adoption as alternative materials remains limited due to integration difficulties at a wafer scale and low CNT density. Here, two integration schemes fully compatible with the processing of 200 mm wafers using conventional silicon technologies are innovatively proposed to manufacture highly dense horizontal CNT membranes at a wafer scale.

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Type
conference paper
Author(s)
Le Poche, Hélène
Fournier, Adeline
Dijon, Jean
Okuno, Hanako
Guerin, Hoël
Ionescu, Mihai Adrian  
Date Issued

2013

Published in
Proceedings of the annual meeting of the GDR-I GNT 2012
Subjects

carbon nanotube membranes

•

interconnects

•

sensors

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
Annual meeting of the GDR-I GNT: Graphene and Nanotubes Science and Applications

Ecully, France

January 23-27, 2012

Available on Infoscience
July 2, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93178
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