Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Gas spectrometry based on a pyroelectric thin film array
 
research article

Gas spectrometry based on a pyroelectric thin film array

Willing, B.
•
Muralt, P.  
•
Setter, N.  
Show more
1999
Ferroelectrics

We present a far infrared gas spectrometer which uses a thin film pyroelectric detector integrated on silicon. The detector is in-house fabricated and consists of 1 x 50 elements of sol-gel deposited, zirconium rich lead titanate (PZT) which are suspended on a submicron membrane for thermal insulation. The detector shows a detectivity of 16 mu A/W and is mounted into a Oriel monochromator fitted with gratings for the 3-5 mu m and the 8-12 mu m range, respectively. The infrared radiation is emitted by a hot filament and chopped mecanically with a frequency of 10 Hz. Absorption spectra of CO and CO2 gas as examples for the 3-5 mu m wavelength range show detection limits of 15 ppm for CO2 and 200 ppm for CO. Line shape investigations show that the cross sensitivity of our instrument can be neglected. In the 8-12 mu m wavelength range, we present absorption measurements for butane gas and N2O, respectively.

  • Details
  • Metrics
Type
research article
DOI
10.1080/00150199908009104
Web of Science ID

WOS:000082079100002

Author(s)
Willing, B.
Muralt, P.  
Setter, N.  
Oehlero, O.
Date Issued

1999

Published in
Ferroelectrics
Volume

225

Issue

1-4

Start page

807

End page

813

Subjects

pyroelectrics

•

thin films

•

array detector

•

gas spectrometer

•

infrared-sensors

Note

Willing, B Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Sens X A G, CH-8005 Zurich, Switzerland

227KG

Cited References Count:11

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233417
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés