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conference paper
Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications
1986
Extended Abstracts of the Fall Meeting of the Electrochemical Society
Type
conference paper
Authors
Publication date
1986
Published in
Extended Abstracts of the Fall Meeting of the Electrochemical Society
Start page
879
End page
880
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record