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research article

PZT thin film actuated elastic fin micromotor

Dubois, M. A.
•
Muralt, P.  
1998
IIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

A piezoelectric elastic fin micromotor based on a PbZr0.53Ti0.47O3 thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 mu Nm were observed for the velocity and the torque, respectively, which would be sufficient for a wristwatch application. The present version exhibited an efficiency of 0.17%, which could theoretically be increased to 4.8%.

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Type
research article
DOI
10.1109/58.726440
Web of Science ID

WOS:000076488000008

Author(s)
Dubois, M. A.
Muralt, P.  
Date Issued

1998

Published in
IIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume

45

Issue

5

Start page

1169

End page

1177

Subjects

motors

Note

Dubois, Ma Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland

129WX

Cited References Count:20

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233327
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