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  4. M-Plane GaN Grown on m-Plane Sapphire by Hydride Vapor Phase Epitaxy
 
research article

M-Plane GaN Grown on m-Plane Sapphire by Hydride Vapor Phase Epitaxy

Zhu, Tiankai
•
Martin, Denis
•
Grandjean, Nicolas  
2009
Japanese Journal of Applied Physics

M-plane GaN epilayers have been directly grown on m-plane sapphire substrates by hydride vapor phase epitaxy using a low temperature GaN nucleation layer. The m-plane GaN surface is optically smooth and mirror-like, with rms roughness similar to 2.0 nm (5 x 5 mu m(2)) measured by atomic force microscopy. We have found that the sapphire surface treatments prior to the growth determine the crystal orientations of the GaN epilayers. In particular, in situ thermal cleaning in H-2 ambient, followed by NH3 nitridation at low temperature, reproducibly results in single m-plane GaN orientation, while other surface preparations lead to semi-polar GaN (10 (1) over bar(3) over bar) plane. (C) 2009 The Japan Society of Applied Physics

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Type
research article
DOI
10.1143/jjap.48.020226
Author(s)
Zhu, Tiankai
Martin, Denis
Grandjean, Nicolas  
Date Issued

2009

Published in
Japanese Journal of Applied Physics
Volume

48

Issue

2

Article Number

0226

Subjects

Optical-Properties

•

Films

•

Nitridation

•

Microstructure

•

Deposition

•

Substrate

•

Diodes

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55146
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