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conference paper

Integrated microfluidic devices based on low-temperature co-fired ceramic (LTCC) technology

Maeder, Thomas  
•
Birol, Hansu  
•
Jacq, Caroline  
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2004
4th Korea-Switzerland Joint Symposium, Materials and MEMS for Life Science Applications
4th Korea-Switzerland Joint Symposium, Materials and MEMS for Life Science Applications

This paper reviews recent developments in integrated fluidic mesosystems, based on low-temperature co-fired ceramic (LTCC) technology, in this laboratory and elsewhere. LTCC is shown to be an advantageous technique for integrated fluidic systems, due to its simplicity, low cost and ease of integration with other technologies and components (silicon, polymer, circuit boards. Also, the techniques utilized in making the structures are presented.

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2004 Maeder LTCC fluidique.pdf

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Postprint

Version

http://purl.org/coar/version/c_ab4af688f83e57aa

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openaccess

Size

1.81 MB

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Adobe PDF

Checksum (MD5)

9c5ff603fec564480dd890bbb1e93a4c

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2004 Maeder Symposium Suisse-Corée Les Diablerets - fluidique LTCC - présentation.pdf

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openaccess

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2.22 MB

Format

Adobe PDF

Checksum (MD5)

71711eb5c1d76055d989912fbf09860e

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