research article
Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion
Type
research article
Author(s)
Date Issued
2000
Publisher
Published in
Volume
76
Issue
21
Start page
3139
End page
3141
Note
242
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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