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  4. LTCC thermal gas viscometer – heater module
 
conference paper

LTCC thermal gas viscometer – heater module

Maeder, Thomas  
•
Jacq, Caroline  
•
Saglini, Igor
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2006
4th European Microelectronics and Packaging Symposium - IMAPS
4th European Microelectronics and Packaging Symposium - IMAPS

In this work, a novel sensor for measuring the viscosity of a gas, based on the combination of a heating cavity, a pressure sensor and a meander with a high resistance to flow, all integrated in low-temperature co-fired ceramic (LTCC) technology, is presented. This paper reports the design, thermal characterisation and modelling of the heater module in quasi-stationary operation. The performance of the heater is satisfactory, and good agreement between experimental and calculated thermal properties is found. Nonetheless, some design changes are recommended, in order to improve heat transport in the heater module.

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Type
conference paper
Author(s)
Maeder, Thomas  
Jacq, Caroline  
Saglini, Igor
Corradini, Giancarlo  
Strässler, Sigfrid
Birol, Hansu  
Ryser, Peter  
Date Issued

2006

Published in
4th European Microelectronics and Packaging Symposium - IMAPS
Start page

61

End page

66

Subjects

Technologie des Couches Epaisses

•

thick-film technology

•

LTCC

•

thermal sensors

•

thermal resistance

•

gas viscosity

•

heaters

•

micro hotplates

•

sensors

Note

©IMAPS 1ère version du module de chauffage Wobbe - mesures, calculs et critique. Les matériaux de l’enveloppe ont une conductivité thermique insuffisante : - Remplacer la colle silicone par de la brasure tendre - Utiliser un capot en alu

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LPM  
Event nameEvent placeEvent date
4th European Microelectronics and Packaging Symposium - IMAPS

Terme Čatež (SI)

5/2006

Available on Infoscience
June 28, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/232435
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