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Sputtered AlN Buffer Layer for Low-Loss Crystalline AlN-on-Sapphire Integrated Photonics
research article
Sputtered AlN Buffer Layer for Low-Loss Crystalline AlN-on-Sapphire Integrated Photonics
Brunetta, Samuele
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Sbarra, Samantha
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Loke, Brandon Shuen Yi
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February 10, 2026
ACS Photonics
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