research article

Sputtered AlN Buffer Layer for Low-Loss Crystalline AlN-on-Sapphire Integrated Photonics

Brunetta, Samuele  
•
Sbarra, Samantha  
•
Loke, Brandon Shuen Yi  
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February 10, 2026
ACS Photonics
Type
research article
DOI
10.1021/acsphotonics.5c02661
Author(s)
Brunetta, Samuele  

École Polytechnique Fédérale de Lausanne

Sbarra, Samantha  

École Polytechnique Fédérale de Lausanne

Loke, Brandon Shuen Yi  

École Polytechnique Fédérale de Lausanne

Carlin, Jean-François  

École Polytechnique Fédérale de Lausanne

Grandjean, Nicolas  

École Polytechnique Fédérale de Lausanne

Brès, Camille-Sophie  

École Polytechnique Fédérale de Lausanne

Butté, Raphaël  

École Polytechnique Fédérale de Lausanne

Date Issued

2026-02-10

Publisher

American Chemical Society (ACS)

Published in
ACS Photonics
Article Number

acsphotonics.5c02661

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LASPE  
PHOSL  
LANES  
FunderFunding(s)Grant NumberGrant URL

Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung

2000-1-240018

Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung

200020_215633

?cole Polytechnique F?d?rale de Lausanne

Available on Infoscience
February 12, 2026
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/259397