X-Band Aom On Chip
Silicon Nitride integrated photonic circuits have drawn much attention owing to its ultra-low loss and large Kerr nonlinearity. However, the lack of Pockels effect makes it difficult to be modulated clectro-optically, which posts a major challenge for the further development of Si3N4 circuits with advanced functions. The widely adopted thermo-optical tuning suffers from large power consumption and restricted speed (similar to 1 kHz). In this study, microwave frequency modulation (up to 9 GHz) of Si3N4 ring resonator is achieved by exciting bulk acoustic waves piezoelectrically, which modulates the microring via stress-optical effect. The acoustic waves are confined tightly in a released SiO2 thin film which enhances the acoustic energy density and thus modulation efficiency.
WOS:000667731600050
2021-01-01
New York
978-1-6654-1912-3
Proceedings IEEE Micro Electro Mechanical Systems
210
213
REVIEWED
Event name | Event place | Event date |
ELECTR NETWORK | Jan 25-29, 2021 | |