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Beam steering system using a 2D MEMS scanner
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conference paper
Beam steering system using a 2D MEMS scanner
Petremand, Yves
•
Epitaux, Marc
•
Hauffe, Ralf
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2007
2007 IEEE LEOS Annual Meeting Conference Proceedings
20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society
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