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research article

Shear mode bulk acoustic wave resonator based on c-axis oriented AIN thin film

Milyutin, E.
•
Gentil, S.  
•
Muralt, P.  
2008
Journal of Applied Physics

A shear mode resonator based on bulk waves trapped in c-axis oriented AlN thin films was fabricated, simulated, and tested. The active 1.55 mu m thick AlN layer was deposited on top of an acoustic Bragg reflector composed of SiO2/AlN lambda/4 layer pairs. The resonance was excited by means of interdigitated electrodes consisting of 150 nm thick Al lines. Analytical and simulation calculations show that the in- plane electric field excites bulk acoustic wave shear modes that are trapped in such an AlN film slab. The experimental frequency corresponds well to the theoretical one. The evaluated resonance of the fundamental shear mode at 1.86 GHz revealed a coupling of 0.15% and Q-factor of 870 in air and 260 in silicon oil.

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Type
research article
DOI
10.1063/1.2996319
Web of Science ID

WOS:000260572100115

Author(s)
Milyutin, E.
Gentil, S.  
Muralt, P.  
Date Issued

2008

Published in
Journal of Applied Physics
Volume

104

Issue

8

Article Number

084508

Subjects

8 GHZ

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
June 25, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40880
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