Loading...
conference paper
Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion
January 1, 2020
2020 Conference On Lasers And Electro-Optics (Cleo)
We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well as integrated travelling wave EO modulators. (c) 2020 The Author(s)
Type
conference paper
Web of Science ID
WOS:000612090003214
Authors
•
Hoenl, Simon
•
•
Moehl, Charles
•
•
Skehan, J. Connor
•
•
Caimi, Daniele
•
•
Seidler, Paul
Publication date
2020-01-01
Publisher
Publisher place
New York
Published in
2020 Conference On Lasers And Electro-Optics (Cleo)
ISBN of the book
978-1-943580-76-7
Series title/Series vol.
Conference on Lasers and Electro-Optics
Start page
STh1F.3
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
San Jose, CA | May 10-15, 2020 | |
Available on Infoscience
March 26, 2021
Use this identifier to reference this record