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  4. Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion
 
conference paper

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Churaev, Mikhail  
•
Hoenl, Simon
•
Wang, Rui Ning  
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January 1, 2020
2020 Conference On Lasers And Electro-Optics (Cleo)
Conference on Lasers and Electro-Optics (CLEO)

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well as integrated travelling wave EO modulators. (c) 2020 The Author(s)

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