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conference paper

Laser-initiated Ga-deposition on quartz substrates

Rytz-Froidevaux, Y.
•
Salathe, R. P.
•
Gilgen, H. H.
1983
Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium

The deposition of Ga on quartz substrates by photodissociation of trimethylgallium has been investigated. Light from a frequency doubled Ar-ion laser beam (257.2 nm) was focused onto quartz substrates. The Ar-ion laser was operated under CW or mode-locking conditions. The deposition rate has been investigated as a function of averaged UV power densities in the range of 1.8-1750 W/cm2 and is shown to depend critically on the laser operating mode. For CW operation, the maximum growth rate within the focal zone is limited to 17 Å/s whereas under mode-locking conditions, no saturation is observed and the growth rate increases linearly with the laser power up to 70 Å/s at 1.75 kW/cm2

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Type
conference paper
DOI
10.1557/PROC-17-29
Author(s)
Rytz-Froidevaux, Y.
Salathe, R. P.
Gilgen, H. H.
Date Issued

1983

Publisher

North-Holland

Published in
Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium
Start page

29

Subjects

chemical vapour deposition

•

gallium

•

laser beam applications

•

metallic thin films

•

metallisation

Note

Inst. of Appl. Phys., Univ. of Berne, Berne, Switzerland

2127482

laser initiated Ga deposition

Ga thin film

quartz substrates

photodissociation

deposition rate

growth rate

Written at

OTHER

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Event place
Available on Infoscience
January 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/33954
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