research article
Three-dimensional miniaturised power Inductors realised in a batch-type hybrid technology
We present a new hybrid technology for the realization of three-dimensional millimetre-size inductors for low-power (0.1–1 W) applications. Our devices consist of electroplated planar Cu coils, realized within a high-resolution (5 µm) polyimide flex-foil process, and mm-size ferrite magnetic cores, obtained by three-dimensional micropatterning of ferrite wafers using powder blasting microerosion. Our devices range in volume between 10 and 1.5 mm3 and we characterize their inductive and resistive properties as a function of frequency.
Type
research article
Author(s)
Date Issued
2002
Published in
Volume
12
Start page
470
End page
474
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 26, 2005
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