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research article

Three-dimensional miniaturised power Inductors realised in a batch-type hybrid technology

Saidani, M.  
•
Gijs, Martin A. M.  
2002
Journal of Micromechanics and Microengineering

We present a new hybrid technology for the realization of three-dimensional millimetre-size inductors for low-power (0.1–1 W) applications. Our devices consist of electroplated planar Cu coils, realized within a high-resolution (5 µm) polyimide flex-foil process, and mm-size ferrite magnetic cores, obtained by three-dimensional micropatterning of ferrite wafers using powder blasting microerosion. Our devices range in volume between 10 and 1.5 mm3 and we characterize their inductive and resistive properties as a function of frequency.

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Type
research article
DOI
10.1088/0960-1317/12/4/321
Author(s)
Saidani, M.  
Gijs, Martin A. M.  
Date Issued

2002

Published in
Journal of Micromechanics and Microengineering
Volume

12

Start page

470

End page

474

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Available on Infoscience
October 26, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218339
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