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  4. In situ core level and valence band photoelectron spectroscopy of reactively sputtered titanium aluminum nitride films
 
research article

In situ core level and valence band photoelectron spectroscopy of reactively sputtered titanium aluminum nitride films

Schueler, Andreas  
•
Oelhafen, Peter
•
Francz, G.
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2001
Physical Review B
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