research article
In situ core level and valence band photoelectron spectroscopy of reactively sputtered titanium aluminum nitride films
2001
Type
research article
Author(s)
Date Issued
2001
Published in
Volume
63
Issue
11
Start page
115413/1
End page
8
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 4, 2012
Use this identifier to reference this record