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  4. Periodic Structure of Narrow FBARs Operating on SH1 Mode in LN Membrane Solidly Mounted on SiC Substrate
 
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conference paper

Periodic Structure of Narrow FBARs Operating on SH1 Mode in LN Membrane Solidly Mounted on SiC Substrate

Plessky, Victor
•
Zhang, Naiqing
•
Xu, Nan  
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2024
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium

We propose a system of narrow FBARs with alternating voltage polarity on top electrodes on the LN platelet and a common bottom floating electrode positioned on a substrate with high acoustic velocity (SiC). This is a YBAR device that is attached to a SiC substrate. Every individual resonator radiates the bulk waves into the substrate. However, if the period of the structure is smaller than the wavelength of bulk waves in the substrate at the operation frequency, the destructive interference of the bulk waves cancels the bulk radiation in a rather long periodic structure. The amplitude of this radiation can be further reduced by optimizing the bottom electrode thickness and by introducing the additional SiO2 layer under the metal electrode. The effects of bottom metal and grooves in the piezo-layer are also studied and discussed based on simulations. Here, we present this practical YBAR-on-SiC resonator with a piezo-coupling of 25.4% and Q of ~200 at 5 GHz. It is a competitive option for potential N79 and 5G WiFi bands for sub-6G applications.

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Type
conference paper
DOI
10.1109/UFFC-JS60046.2024.10794067
Scopus ID

2-s2.0-85216442109

Author(s)
Plessky, Victor
•
Zhang, Naiqing
•
Xu, Nan  
•
Kucuk, Seniz Esra  
•
Villanueva, Luis Guillermo  
Date Issued

2024

Publisher

Institute of Electrical and Electronics Engineers Inc.

Published in
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
DOI of the book
https://doi.org/10.1109/UFFC-JS60046.2024
ISBN of the book

9798350371901

Subjects

high-frequency resonator

•

SH1 mode

•

SiC high velocity substrate

•

sub-6G filter applications

•

thin-film lithium niobate

•

YBAR

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent acronymEvent placeEvent date
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium

Taipei, Taiwan, Province of China

2024-09-22 - 2024-09-26

Available on Infoscience
February 18, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/247052
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