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conference paper
MEMS Hotplates with TiN as a Heater Material
2005
The 4th IEEE Conference on Sensors 2005
Type
conference paper
Author(s)
Cremer, J. F.
•
•
van der Vlist, W.
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de Boer, C.
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•
Zandbergen, H. W.
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Sarro, P. M.
Date Issued
2005
Journal
The 4th IEEE Conference on Sensors 2005
Start page
330
End page
333
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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