Tunable Optical Microsystems featuring Vertical Electrostatic Comb Drives

OVERSTOLZ, Thomas

2007

Tunable Optical Microsystems featuring Vertical Electrostatic Comb Drives

doctoral thesis

Name

these_OverstolzT.pdf

Access type

openaccess

Size

3.48 MB

Format

Adobe PDF

Checksum (MD5)

45fc821a25d4e451d3cb0665fa7c87c3