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  4. Electron spectroscopy for chemical analysis spectrum of r.f. sputtered gallium arsenide
 
research article

Electron spectroscopy for chemical analysis spectrum of r.f. sputtered gallium arsenide

McEvoy, A. J.  
•
Wrixon, G. T.
•
Parkes, A.
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1979
Thin Solid Films
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Type
research article
DOI
10.1016/0040-6090(79)90490-5
Author(s)
McEvoy, A. J.  
Wrixon, G. T.
Parkes, A.
Montgomery, V.
Date Issued

1979

Published in
Thin Solid Films
Volume

61

Issue

3

Start page

L23

End page

L25

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPI  
Available on Infoscience
February 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/224289
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