Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Micromachined infrared detectors based on pyroelectric thin films
 
research article

Micromachined infrared detectors based on pyroelectric thin films

Muralt, P.  
2001
Reports on Progress in Physics

The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacities and the substrate influence on the pyroelectric properties. For the latter, an overview of the hitherto reported values is given. Examples of micromachined IR detectors based on pyroelectric thin films are described. The ultimate limit of micromachined thermal IR detectors is estimated for uncooled operation. It is concluded that the best pyroelectric thin films achieved to date are in principle sufficiently good to approach this limit, meaning that the present performance of pyroelectric thin-film focal plane arrays can still be improved by more than a factor of 10. A comparison of the different principles for IR detection shows that pyroelectricity is indeed one of the most competitive principles for uncooled IR detection. The major obstacle hindering quick industrialization is the fabrication complexity.

  • Details
  • Metrics
Type
research article
DOI
10.1088/0034-4885/64/10/203
Web of Science ID

WOS:000171957200003

Author(s)
Muralt, P.  
Date Issued

2001

Published in
Reports on Progress in Physics
Volume

64

Issue

10

Start page

1339

End page

1388

Subjects

misfit relaxation mechanisms

•

lead scandium tantalate

•

domain configurations

•

dielectric loss

•

sensor arrays

•

silicon

•

layers

•

deposition

•

microbolometers

•

transition

Note

Muralt, P Swiss Fed Inst Technol, EPFL, Dept Mat Sci, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, EPFL, Dept Mat Sci, Ceram Lab, CH-1015 Lausanne, Switzerland

488VP

Cited References Count:131

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233458
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés