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  4. Heterogeneous Integration of Low Power pH FinFET sensors with Passive Capillary Microfluidics and miniaturized Ag/AgCl quasi-Reference Electrode
 
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conference paper

Heterogeneous Integration of Low Power pH FinFET sensors with Passive Capillary Microfluidics and miniaturized Ag/AgCl quasi-Reference Electrode

Garcia Cordero, Erick Antonio  
•
Guérin, Hoël Maxime  
•
Muhech, Amira
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2016
2016 46Th European Solid-State Device Research Conference (Essderc)
European Solid-State Device Research Conference (ESSDERC)

This work presents one of the first low power pH sensing microfluidic chip based on the heterogeneous integration of: (i) high-k FinFET sensors with liquid gate, (ii) miniaturized Ag/AgCl quasi-Reference Electrode and (iii) passive microfluidic. The integration of these three components provides a fully integrated and compact platform that could be exploited for ionic monitoring in biofluids for healthcare applications. We describe the full fabrication process for the microfluidic system with the embedded reference electrode. The electrical characterization of heterogeneously integrated pH FinFET sensor with the integrated reference electrode shows Id-Vg characteristics with subthreshold swing SS~141mV/dec, low Ioff current and ION/IOFF > 105. When applying a constant current operation scheme, a sensitivity of 8mV/pH of the output drain voltage is reported. Due to the biocompatibility of the selected materials and small size, the resulting microsystem-on-chip could be used as a noninvasive wearable sensor for continuous monitoring of pH in sweat.

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Type
conference paper
DOI
10.1109/ESSDERC.2016.7599683
Web of Science ID

WOS:000386655900109

Author(s)
Garcia Cordero, Erick Antonio  
•
Guérin, Hoël Maxime  
•
Muhech, Amira
•
Bellando, Francesco  
•
Ionescu, Mihai Adrian  
Date Issued

2016

Publisher

Ieee

Publisher place

New York

Published in
2016 46Th European Solid-State Device Research Conference (Essderc)
ISBN of the book

978-1-5090-2969-3

Total of pages

4

Series title/Series vol.

Proceedings of the European Solid-State Device Research Conference

Start page

452

End page

455

Subjects

Passive Microfluidics

•

Miniaturized Reference Electrode

•

FinFET pH sensor

•

Heterogeneous Integration

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
European Solid-State Device Research Conference (ESSDERC)

Lausanne, Switzerland

September 12-15, 2016

Available on Infoscience
October 18, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/129787
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