Loading...
Micromechanical relay with electrostatic actuation and metallic contacts
research article
In this paper, an improved design of an electrostatic polysilicon microrelay with metallic contacts is presented. The polysilicon layer is used for the actuator while the nickel and gold layers are used for the contacts. Improved contact resistance is demonstrated, as well as the efficiency of multiple contact bars. Moreover, by integrating nickel bars, electromagnetic actuation was successfully performed.
Type
research article
Author(s)
Date Issued
1999
Published in
Volume
9
Start page
324
End page
331
Note
222
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record