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research article

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Faizan, Muhammad  
•
Villanueva, Luis Guillermo  
January 1, 2020
Journal Of Micromechanics And Microengineering

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 nm-thick X-cut LN membrane anchored from two ends with interdigitated transducer (IDT) on the top. We present a frequency-scalable process flow using e-beam lithography for the fabrication of ultra-high frequency (10(8) to 10(9) Hz) devices. Our fabricated devices yield the highest reported electromechanical coupling (k(t)(2)) of 31% and 40% for S0 and SH0 modes, respectively, in X-cut LN. We also investigate the influence of IDT material and coverage on k(t)(2) and quality factor (Q) by fabricating identical devices with aluminum and platinum electrodes with electrode coverages ranging from 20% to 70%.

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Type
research article
DOI
10.1088/1361-6439/ab5b7b
Web of Science ID

WOS:000590157500001

Author(s)
Faizan, Muhammad  
•
Villanueva, Luis Guillermo  
Date Issued

2020-01-01

Publisher

IOP PUBLISHING LTD

Published in
Journal Of Micromechanics And Microengineering
Volume

30

Issue

1

Article Number

015008

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Physics

•

mems

•

lithium niobate

•

rf filters

•

electron beam (e-beam) lithography

•

lamb wave resonators

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
December 2, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/173748
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