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conference paper

MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive

Mehdaoui, A. 
•
Pisani, M. B. 
•
Tsamados, D.
more
2007
Microsystem Technologies
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Type
conference paper
DOI
10.1007/s00542-006-0350-5
Web of Science ID

WOS:000252826700022

Authors
Mehdaoui, A. 
•
Pisani, M. B. 
•
Tsamados, D.
•
Casset, F.
•
Ancey, P.
•
Ionescu, A. M. 
Publication date

2007

Published in
Microsystem Technologies
Volume

13

Issue

11-12

Start page

1589

End page

1594

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB 
Event nameEvent placeEvent date
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006

Stresa, Italy

April 2006

Available on Infoscience
May 16, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/6986