conference paper

MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive

Mehdaoui, A.  
•
Pisani, M. B.  
•
Tsamados, D.
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2007
Microsystem Technologies
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006