conference paper

MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive

Mehdaoui, A.  
•
Pisani, M. B.  
•
Tsamados, D.
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2007
Microsystem Technologies
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Type
conference paper
DOI
10.1007/s00542-006-0350-5
Web of Science ID

WOS:000252826700022

Author(s)
Mehdaoui, A.  
Pisani, M. B.  
Tsamados, D.
Casset, F.
Ancey, P.
Ionescu, A. M.  
Date Issued

2007

Published in
Microsystem Technologies
Volume

13

Issue

11-12

Start page

1589

End page

1594

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006

Stresa, Italy

April 2006

Available on Infoscience
May 16, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/6986