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  4. A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors
 
conference presentation

A Comb Drive Actuated Vertically Moving Micromirror for Mid-Infrared Resonant Cavity Enhanced Detectors

Quack, Niels  
•
Rust, Philipp
•
Blunier, Stefan
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2008
34th international conference on Micro and Nano Engineering (MNE)
  • Details
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Type
conference presentation
Author(s)
Quack, Niels  
Rust, Philipp
Blunier, Stefan
Dual, Jurg
Felder, Ferdinand
Rahim, Mohamed
Fill, Matthias
Arnold, Martin
Zogg, Hans
Date Issued

2008

Written at

EPFL

EPFL units
GR-QUA  
Event nameEvent placeEvent date
34th international conference on Micro and Nano Engineering (MNE)

Athens, Greece

September 15-18, 2008

Available on Infoscience
July 8, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116126
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