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  4. Vibration energy harvester on plastic foil based on transferring PZT thick sheets
 
conference paper

Vibration energy harvester on plastic foil based on transferring PZT thick sheets

Vasquez Quintero, Andres
•
Briand, Danick  
•
Janphuang, Pattanaphong  
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2012
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2012
MEMS 2012

This paper presents a low-complexity and low temperature (85°C) fabrication process for vibration energy harvesters. The process employs lamination steps to transfer thinned PZT thick sheets onto flexible polymeric substrates, using dry film photoresist. The influence of geometrical parameters on the device performance were assessed by FEM simulations (using COMSOL) and supported by experiments. Optimization of the output power was performed by modifying the neutral plane within the device and by using a localized seismic mass at the tip, which has resulted in an output power of 30 μW at 52 Hz and an acceleration of 1g. Finally, a low-complexity and fully polymeric package is proposed, which together with the harvester process are compatible with large area fabrication methods.

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Type
conference paper
DOI
10.1109/MEMSYS.2012.6170393
Web of Science ID

WOS:000312912800324

Author(s)
Vasquez Quintero, Andres
•
Briand, Danick  
•
Janphuang, Pattanaphong  
•
Ruan, Jinyu Jason
•
Lockhart, Robert  
•
de Rooij, Nico F.  
Date Issued

2012

Published in
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2012
Volume

1

Start page

1289

End page

1292

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
MEMS 2012

Paris, France

January 30-February 2, 2012

Available on Infoscience
August 30, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/85159
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