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research article

Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Canonica, Michael D.
•
Zamkotsian, Frédéric
•
Lanzoni, Patrick
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2013
Optics Express

A micromirror array composed of 2048 silicon micromirrors measuring 200 x 100 mu m(2) and tilting by 25 degrees was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively. (c) 2013 Optical Society of America

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Type
research article
DOI
10.1364/OE.21.022400
Web of Science ID

WOS:000325547200064

Author(s)
Canonica, Michael D.
•
Zamkotsian, Frédéric
•
Lanzoni, Patrick
•
Noell, Wilfried  
•
de Rooij, Nico  
Date Issued

2013

Publisher

Optical Society of America

Published in
Optics Express
Volume

21

Issue

19

Article Number

22400

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
October 3, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/96071
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