research article

Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

Meyer, Y.
•
Verdot, T.
•
Collet, M.
Show more
2007
Smart Materials & Structures
Type
research article
DOI
10.1088/0964-1726/16/1/016
Web of Science ID

WOS:000243903300036

Author(s)
Meyer, Y.
Verdot, T.
Collet, M.
Baborowski, J.  
Muralt, P.  
Date Issued

2007

Published in
Smart Materials & Structures
Volume

16

Issue

1

Start page

128

End page

134

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
October 18, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/13144