research article

Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices

Prume, K.
•
Muralt, P.  
•
Calame, F.  
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2007
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control
Type
research article
DOI
10.1109/TUFFC.2007.206
Web of Science ID

WOS:000243042700001

Author(s)
Prume, K.
Muralt, P.  
Calame, F.  
Schmitz-Kempen, T.
Tiedke, S.
Date Issued

2007

Published in
Ieee Transactions On Ultrasonics Ferroelectrics And Frequency Control
Volume

54

Issue

1

Start page

8

End page

14

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
October 18, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/13148