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  4. Polymer micro-molding of femtosecond laser micromachined substrates
 
conference paper

Polymer micro-molding of femtosecond laser micromachined substrates

Matteucci, Marco
•
Madani-Grasset, Frederic
•
Bellouard, Yves  
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2011
FRONTIERS IN ULTRAFAST OPTICS: BIOMEDICAL, SCIENTIFIC, AND INDUSTRIAL APPLICATIONS XI
Conference on Frontiers in Ultrafast Optics - Biomedical, Scientific, and Industrial Applications XI

Micro-molding can be used for the cost-effective fabrication of elements such as active or passive components in MEMS devices, hydrophobic surfaces, cell-growth scaffolds or optical components such micro-lens arrays and gratings. This method is also particularly interesting for examining high-aspect ratio laser-machined structures fabricated in glass material. Thanks to this technique, surfaces not accessible with common imaging techniques can be observed on their molded negative structure with very high fidelity. As an illustration, we issue the use of the PDMS molding technique to analyze the quality of high aspect ratio holes and channels structures. Furthermore, we show preliminary results on the molding of a novel type of complex structures formed in glass using temporal and spatial beam shaping.

  • Details
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Type
conference paper
DOI
10.1117/12.886305
Author(s)
Matteucci, Marco
Madani-Grasset, Frederic
Bellouard, Yves  
Vitek, Dawn
Squier, Jeff
Date Issued

2011

Publisher

SPIE-INT SOC OPTICAL ENGINEERING

Publisher place

BELLINGHAM, WA

Published in
FRONTIERS IN ULTRAFAST OPTICS: BIOMEDICAL, SCIENTIFIC, AND INDUSTRIAL APPLICATIONS XI
Volume

7925

Subjects

Femtosecond laser

•

nonlinear absorption

•

fused silica

•

molding

•

PDMS

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Event nameEvent placeEvent date
Conference on Frontiers in Ultrafast Optics - Biomedical, Scientific, and Industrial Applications XI

San Francisco, CA

January 23-26, 2011

Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116473
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