conference paper
Breakdown Mechanisms of Electrostatic Polysilicon Actuators Using as an Example the REMO Component
1996
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications
Type
conference paper
Author(s)
Date Issued
1996
Published in
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications
Start page
15
End page
16
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record