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Nanostencil-based lithography for silicon nanowires fabrication
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conference paper
Nanostencil-based lithography for silicon nanowires fabrication
Grogg, D.
•
Santschi, C.
•
Pott, V.
Show more
2005
Nanoelectronics Days 2005
Details
Metrics
Type
conference paper
Author(s)
Grogg, D.
•
Santschi, C.
•
Pott, V.
•
Ionescu, A. M.
•
Brugger, J.
Date Issued
2005
Published in
Nanoelectronics Days 2005
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
NANOLAB
Available on Infoscience
May 16, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/6951