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conference paper

Nanostencil-based lithography for silicon nanowires fabrication

Grogg, D.
•
Santschi, C.
•
Pott, V.  
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2005
Nanoelectronics Days 2005
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Type
conference paper
Author(s)
Grogg, D.
•
Santschi, C.
•
Pott, V.  
•
Ionescu, A. M.  
•
Brugger, J.
Date Issued

2005

Published in
Nanoelectronics Days 2005
Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
May 16, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/6951
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