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research article

Oxygen species in SiO2: a first-principles investigation

Bongiorno, A.
•
Pasquarello, Alfredo  
2001
Microelectronic Engineering

Using a density functional approach, we determine the relative stability of various oxygen species in alpha -quartz. We considered interstitial species in the form of atomic and molecular oxygen, as well as network species, such as peroxyl and ozonyl link-ages. The interstitial molecular oxygen species is found to be the most stable one. The ozonyl link-age lies higher in energy by 1.0 eV. Dissociation of the interstitial O-2 molecule into two peroxyl linkages or into two interstitial oxygen species occurs at even higher energies (1.6 and 3.2 eV respectively). These results favor a long-range diffusion mechanism based on the interstitial O-2 molecule. (C) 2001 Elsevier Science B.V. All rights reserved.

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Type
research article
DOI
10.1016/S0167-9317(01)00661-X
Web of Science ID

WOS:000172218100024

Author(s)
Bongiorno, A.
Pasquarello, Alfredo  
Date Issued

2001

Published in
Microelectronic Engineering
Volume

59

Issue

1-4

Start page

167

End page

172

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CSEA  
Available on Infoscience
October 8, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43417
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