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  4. In situ core-level and valence-band photoelectron spectroscopy of reactively sputtered tungsten oxide films
 
research article

In situ core-level and valence-band photoelectron spectroscopy of reactively sputtered tungsten oxide films

Bouvard, Olivia  
•
Krammer, Anna  
•
Schueler, Andreas  
2016
Surface and Interface Analysis

In this paper, we study tungsten oxides deposited by reactive magnetron sputtering. The total working pressure during deposition was varied in order to obtain different morphology. The effects on the electronic properties and chemical composition were studied by XPS and UPS. It was observed that, for the same argon to oxygen ratio in the gas feed, the decrease in total working pressure implies a decrease of the oxygen content in the film. In the nearly stoichiometric WO3 films, W 4f5/2 and W 4f7/2 form a distinct doublet peak. In sub-stoichiometric films, the films do not exhibit a well-resolved doublet and suggest multiple oxidation states of tungsten.The valence-band spectra of the sub-stoichiometric samples present an additional feature below the Fermi edge (~0.5 eV). This peak is assigned to W 5d1 because of the presence of W5+. It is consistent with the changes on the core-level spectra. XPS results, UPS features, and visual aspect are in agreement and suggest that the total working pressure has a strong influence on the oxygen content and therefore on the oxidation state of tungsten in the films.

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Type
research article
DOI
10.1002/sia.5927
Web of Science ID

WOS:000379680000058

Author(s)
Bouvard, Olivia  
Krammer, Anna  
Schueler, Andreas  
Date Issued

2016

Publisher

Wiley-Blackwell

Published in
Surface and Interface Analysis
Volume

48

Issue

7

Start page

660

End page

663

Subjects

tunsten oxide

•

XPS

•

UPS

•

magnetron sputtering

•

in situ

URL

URL

http://onlinelibrary.wiley.com/doi/10.1002/sia.5927/full
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LESO-PB  
Available on Infoscience
January 15, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/122263
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