conference paper not in proceedings
Microfabrication of high aspect ratio and complex monolithic suspended structures in glass
2002
Type
conference paper not in proceedings
Author(s)
Date Issued
2002
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Lugano, Switzerland | September 16-19 | |
Available on Infoscience
October 26, 2005
Use this identifier to reference this record