research article
Roughness of titanium silicide thin films investigated by optical diffusion measurements and electron microscopy
Type
research article
Web of Science ID
WOS:A1987H196400006
Author(s)
Date Issued
1987
Published in
Volume
42
Issue
236
Start page
21
End page
3
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 15, 2007
Use this identifier to reference this record