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research article

Integrated LTCC pressure / flow / temperature multisensor for compressed air diagnostics

Fournier, Yannick  
•
Maeder, Thomas  
•
Boutinard Rouelle, Grégoire
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2010
Sensors

We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues. Keywords: LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting

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Type
research article
DOI
10.3390/s101211156
Web of Science ID

WOS:000285708700036

Author(s)
Fournier, Yannick  
Maeder, Thomas  
Boutinard Rouelle, Grégoire
Barras, Aurélie
Craquelin, Nicolas
Ryser, Peter  
Date Issued

2010

Published in
Sensors
Volume

10

Issue

12

Start page

11156

End page

11173

Subjects

Couches épaisses

•

Thick-film technology

•

LTCC

•

Capteurs

•

Sensors

•

Multicapteurs

•

Multisensors

•

Pression

•

Pressure

•

Débit

•

Flow

•

Température

•

Temperature

•

Structuration 3D

•

Air comprimé

•

Compressed air

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LPM  
Available on Infoscience
December 12, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/62038
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