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  4. Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic
 
conference paper

Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic

Guerin, Louis
•
Bossel, M.
•
Demierre, Michel
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1997
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS
1997 International Conference on Solid-State Sensors and Actuators

In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.

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