Loading...
conference paper
Microstructures Study of Pt Thin Film Used in MEMS Fabrication
2003
BENEFRI Materials Day
Type
conference paper
Author(s)
Date Issued
2003
Published in
BENEFRI Materials Day
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record