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conference paper
Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies
2004
10th Int. Meeting on Chemical Sensors
Type
conference paper
Authors
Schöning, M. J.
•
Näther, N.
•
Auger, V.
•
Poghossian, A.
•
Koudelka-Hep, M.
Publication date
2004
Published in
10th Int. Meeting on Chemical Sensors
Peer reviewed
NON-REVIEWED
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May 12, 2009
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