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  4. Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies
 
conference paper

Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies

Schöning, M. J.
•
Näther, N.
•
Auger, V.
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2004
10th Int. Meeting on Chemical Sensors
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Type
conference paper
Author(s)
Schöning, M. J.
Näther, N.
Auger, V.
Poghossian, A.
Koudelka-Hep, M.
Date Issued

2004

Published in
10th Int. Meeting on Chemical Sensors
Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39824
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