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  4. MBE growth and characterization of MODFET heterostructures using pseudomorphic InGaAs or InAs/GaAs superlattice channels
 
conference paper

MBE growth and characterization of MODFET heterostructures using pseudomorphic InGaAs or InAs/GaAs superlattice channels

Baeta Moreira, M.V.
•
Py, M.A.
•
Ilegems, M.  
1991
Microelectronic Engineering

We studied the influence of the growth temperature Ts and of the InGaAs quantum-well channel thickness dch on the 300 and 77 K Hall electrical properties of pseudomorphic MODFET-type heterostructures grown by molecular-beam epitaxy (MBE). In agreement with Nguyen et al., we find an optimum channel thickness of 90 Å for an indium composition y = 0.25 of the channel. Significant improvements in sheet resistivity ϱs and in carrier concentration nso were obtained by using AlGaAs doped barriers on both sides of the pseudomorphic channel. We were thus able to obtain a 2DEG sheet density nso as high as 4.0×1012 cm-2 at 77 K, which is among the highest values reported for MODFET's on GaAs. Promising results were obtained on MODFET's using an (InAs)m (GaAs)n short period superlattice for the channel.

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Type
conference paper
DOI
10.1016/0167-9317(91)90287-N
Author(s)
Baeta Moreira, M.V.
Py, M.A.
Ilegems, M.  
Date Issued

1991

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

15

Issue

1-4

Start page

573

End page

576

Subjects

InGaAs quantum well

•

Hall

•

superlattice (InAs)m(GaAs)n

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOEQ  
Available on Infoscience
August 28, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/117460
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