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  4. Opto-thermal actuation in double layer polymer microcantilevers
 
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conference paper

Opto-thermal actuation in double layer polymer microcantilevers

Martin-Olmos, C.
•
Villanueva, L. G.  
•
Llobera, A.
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2011
Nano-Opto-Mechanical Systems (Noms)
Nano-Opto-Mechanical Systems (NOMS)

Photostructurable polymers, such as SU-8, have large potential impact on the field of MEMS/NEMS, allowing simple fabrication of plastic MEMS/NEMS devices with nearly vertical sidewalls and high aspect ratios using standard photolithographic procedures. Functional properties (as electrical conductivity or photoluminiscence) can be added to a photostructurable polymer by doping the material with nanoparticles and/or nanocrystals. We present here the case in which the resulting material presents opto-thermal properties if it is combined with an undoped polymer. From all the different mechanisms for heating the structure, opto-thermal actuation is interesting from the point of view that it is possible to obtain a mechanical energy transduction without requiring physical contact or proximity interaction, i.e. devices can be moved merely by focusing light on it.

  • Details
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Type
conference paper
DOI
10.1117/12.897353
Author(s)
Martin-Olmos, C.
•
Villanueva, L. G.  
•
Llobera, A.
•
Voigt, A.
•
Gruetzner, G.
•
Abadal, G.
•
Perez-Murano, F.
Date Issued

2011

Published in
Nano-Opto-Mechanical Systems (Noms)
Volume

8107

Subjects

opto-thermal

•

polymer

•

actuator

•

polyaniline

Note

Martin-Olmos, C IMB CNM CSIC, Barcelona 08193, Spain IMB CNM CSIC, Barcelona 08193, Spain IMB CNM CSIC, Barcelona 08193, Spain, Bxb39, Times Cited:0, Cited References Count:14, Proceedings of SPIE

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
Event nameEvent placeEvent date
Nano-Opto-Mechanical Systems (NOMS)

San Diego, USA

2011

Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93833
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